Inventor
SCHWARZENBACHER REINHOLD
AT7 patents
⚠️ This page may combine multiple inventors who share the name “SCHWARZENBACHER REINHOLD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES AG
5 patentsUS9698029B2Jul 4, 2017
Method and apparatus for processing wafer-shaped articles
LAM RES AG2 citations68
US9779979B2Oct 3, 2017
Apparatus for liquid treatment of wafer shaped articles
LAM RES AG2 citations66
US10134611B2Nov 20, 2018
Collector for use with an apparatus for treating wafer-shaped articles
LAM RES AG0 citations48
US9972514B2May 15, 2018
Apparatus for liquid treatment of wafer shaped articles
LAM RES AG1 citations47
US10483010B2Nov 19, 2019
Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environment
LAM RES AG0 citations30