Inventor

CHANG SHIH MIN

TW2 patents

Patents

2 patents

US10179878B2Jan 15, 2019

Wet etch chemistry for selective silicon etch

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82

US10676668B2Jun 9, 2020

Wet etch chemistry for selective silicon etch

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71