Inventor

OOTAKA Yoshinobu

JP2 patents

Patents

2 patents

US11769650B2Sep 26, 2023

Multistage-connected multipole, multistage multipole unit, and charged particle beam device

HITACHI HIGH TECH CORP0 citations55

US11769649B2Sep 26, 2023

Multipole unit and charged particle beam device

HITACHI HIGH TECH CORP0 citations53