Inventor
OZOLS GUNARS M
4 patents
Patents
4 patentsUS4350578ASep 21, 1982
Cathode for etching
IBM85 citations94
US4203800AMay 20, 1980
Reactive ion etching process for metals
IBM33 citations88
US4335506AJun 22, 1982
Method of forming aluminum/copper alloy conductors
IBM25 citations78
US4229247AOct 21, 1980
Glow discharge etching process for chromium
IBM25 citations78