Inventor

MURALT PAUL-RENE

CH4 patents

⚠️ This page may combine multiple inventors who share the name “MURALT PAUL-RENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BALZERS HOCHVAKUUM

2 patents

US5693238ADec 2, 1997

Method for improving the rate of a plasma enhanced vacuum treatment

BALZERS HOCHVAKUUM45 citations94

US5571331ANov 5, 1996

Vacuum treatment apparatus

BALZERS HOCHVAKUUM18 citations72

UNAXIS BALZERS AG

1 patent

US6533534B2Mar 18, 2003

Method for improving the rate of a plasma enhanced vacuum treatment

UNAXIS BALZERS AG19 citations91

TOKYO ELECTRON LTD

1 patent

US5997686ADec 7, 1999

Process for setting a working rate distribution in an etching or plasma CVD apparatus

TOKYO ELECTRON LTD15 citations67