Inventor

OOSHIMA AKIFUMI

JP2 patents

Patents

2 patents

US6933185B2Aug 23, 2005

Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor

SONY CORP11 citations72

US6798498B2Sep 28, 2004

Apparatus for evaluating polysilicon film

SONY CORP8 citations69