Inventor

KOWALEWSKI JOHANNES

DE2 patents

Patents

2 patents

US7094674B2Aug 22, 2006

Method for production of contacts on a wafer

INFINEON TECHNOLOGIES AG13 citations81

US6982495B2Jan 3, 2006

Mark configuration, wafer with at least one mark configuration, and a method of producing at least one mark configuration

INFINEON TECHNOLOGIES AG0 citations41