Inventor

RUSU CRISTINA

SE2 patents

Patents

2 patents

US7176111B2Feb 13, 2007

Method for depositing polycrystalline SiGe suitable for micromachining and devices obtained thereof

IMEC INTER UNI MICRO ELECTR16 citations81

US7235281B2Jun 26, 2007

Method for the closure of openings in a film

IMEC INTER UNI MICRO ELECTR13 citations79