Inventor
SHAH KARTIK B
US5 patents
Patents
5 patentsUS11586160B2Feb 21, 2023
Reducing substrate surface scratching using machine learning
APPLIED MATERIALS INC2 citations68
US9111980B2Aug 18, 2015
Gas exhaust for high volume, low cost system for epitaxial silicon deposition
APPLIED MATERIALS INC2 citations60
US11835927B2Dec 5, 2023
Reducing substrate surface scratching using machine learning
APPLIED MATERIALS INC0 citations58
USD1110334SJan 27, 2026
Display screen with graphical user interface
APPLIED MATERIALS INC0 citations56
US12228905B2Feb 18, 2025
Eco-efficiency monitoring and exploration platform for semiconductor manufacturing
APPLIED MATERIALS INC0 citations45