Inventor

ERHARDT AIMEE S

US3 patents

Patents

3 patents

US12584240B2Mar 24, 2026

Low mass substrate support

APPLIED MATERIALS INC0 citations46

US12497697B2Dec 16, 2025

Layer with discrete islands formed on a substrate support

APPLIED MATERIALS INC0 citations45

US12534798B2Jan 27, 2026

Method of coating a chamber component

APPLIED MATERIALS INC0 citations41