Inventor
SHENDON NORM
US24 patents
⚠️ This page may combine multiple inventors who share the name “SHENDON NORM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS5738574AApr 14, 1998
Continuous processing system for chemical mechanical polishing
APPLIED MATERIALS INC797 citations99
US5643053AJul 1, 1997
Chemical mechanical polishing apparatus with improved polishing control
APPLIED MATERIALS INC243 citations99
US5624299AApr 29, 1997
Chemical mechanical polishing apparatus with improved carrier and method of use
APPLIED MATERIALS INC291 citations99
US5961372AOct 5, 1999
Substrate belt polisher
APPLIED MATERIALS INC104 citations98
US5820448AOct 13, 1998
Carrier head with a layer of conformable material for a chemical mechanical polishing system
APPLIED MATERIALS INC99 citations98
US5795215AAug 18, 1998
Method and apparatus for using a retaining ring to control the edge effect
APPLIED MATERIALS INC243 citations98
US5681215AOct 28, 1997
Carrier head design for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC222 citations98
US6126517AOct 3, 2000
System for chemical mechanical polishing having multiple polishing stations
APPLIED MATERIALS INC63 citations96
US6080046AJun 27, 2000
Underwater wafer storage and wafer picking for chemical mechanical polishing
APPLIED MATERIALS INC49 citations96
US5913718AJun 22, 1999
Head for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC34 citations96
US5899800AMay 4, 1999
Chemical mechanical polishing apparatus with orbital polishing
APPLIED MATERIALS INC30 citations96
US5709593AJan 20, 1998
Apparatus and method for distribution of slurry in a chemical mechanical polishing system
APPLIED MATERIALS INC188 citations96
US5582534ADec 10, 1996
Orbital chemical mechanical polishing apparatus and method
APPLIED MATERIALS INC88 citations96
US5951373ASep 14, 1999
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning
APPLIED MATERIALS INC62 citations94
US7255632B2Aug 14, 2007
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
APPLIED MATERIALS INC13 citations93
US7097544B1Aug 29, 2006
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
APPLIED MATERIALS INC18 citations93
US6503134B2Jan 7, 2003
Carrier head for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC16 citations92
US6336851B1Jan 8, 2002
Substrate belt polisher
APPLIED MATERIALS INC21 citations92
US6019671AFeb 1, 2000
Carrier head for a chemical/mechanical polishing apparatus and method of polishing
APPLIED MATERIALS INC23 citations92
US6136715AOct 24, 2000
Circumferentially oscillating carousel apparatus for sequentially polishing substrates
APPLIED MATERIALS INC33 citations91
US7238090B2Jul 3, 2007
Polishing apparatus having a trough
APPLIED MATERIALS INC10 citations84
US6267656B1Jul 31, 2001
Carrier head for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC4 citations74
US6245680B1Jun 12, 2001
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning
APPLIED MATERIALS INC2 citations61