Inventor
SHIRALAGI KUMAR
US23 patents
Patents
23 patentsUS5943574AAug 24, 1999
Method of fabricating 3D multilayer semiconductor circuits
MOTOROLA INC399 citations99
US5700703ADec 23, 1997
Method of fabricating buried control elements in semiconductor devices
MOTOROLA INC77 citations95
US5956568ASep 21, 1999
Methods of fabricating and contacting ultra-small semiconductor devices
MOTOROLA INC15 citations73
US5942952AAug 24, 1999
VCO with multiple negative differential resistance devices
MOTOROLA INC9 citations73
US5846609ADec 8, 1998
Masking methods for semiconductor materials
MOTOROLA INC10 citations73
US5591666AJan 7, 1997
Semiconductor device and method of fabrication
MOTOROLA INC9 citations73
US5904552AMay 18, 1999
Method of resistless patterning of a substrate for implantation
MOTOROLA INC14 citations72
US5830801ANov 3, 1998
Resistless methods of gate formation in MOS devices
MOTOROLA INC8 citations66
US5897366AApr 27, 1999
Method of resistless gate metal etch for fets
MOTOROLA INC2 citations63
US6265329B1Jul 24, 2001
Quantum deposition distribution control
MOTOROLA INC5 citations62
US6172420B1Jan 9, 2001
Silicon delta-doped gallium arsenide/indium arsenide heterojunction OHMIC contact
MOTOROLA INC4 citations62
US6124146ASep 26, 2000
Resistless device fabrication method
MOTOROLA INC6 citations62
US6043143AMar 28, 2000
Ohmic contact and method of manufacture
MOTOROLA INC2 citations62
US5877071AMar 2, 1999
Masking methods during semiconductor device fabrication
MOTOROLA INC3 citations62
US5759880AJun 2, 1998
Resistless methods of fabricating FETs
MOTOROLA INC4 citations62
US5730798AMar 24, 1998
Masking methods during semiconductor device fabrication
MOTOROLA INC4 citations62
US5756154AMay 26, 1998
Masking methods during semiconductor device fabrication
MOTOROLA INC2 citations60
US6211530B1Apr 3, 2001
Sparse-carrier devices and method of fabrication
MOTOROLA INC5 citations58
US6452205B2Sep 17, 2002
Sparse-carrier devices and method of fabrication
MOTOROLA INC0 citations52
US6001722ADec 14, 1999
Selective metallization/deposition for semiconductor devices
MOTOROLA INC0 citations52
US5837560ANov 17, 1998
Method of masking substrates leaving exposed facets
MOTOROLA INC0 citations52
US5733817AMar 31, 1998
Blanket oxidation for contact isolation
MOTOROLA INC0 citations52
US5709744AJan 20, 1998
Masking methods during semiconductor device fabrication
MOTOROLA INC0 citations52