Inventor

GULLIKSON ERIC M

US2 patents

⚠️ This page may combine multiple inventors who share the name “GULLIKSON ERIC M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EUV LLC

1 patent

US6815129B1Nov 9, 2004

Compensation of flare-induced CD changes EUVL

EUV LLC57 citations93

PADMORE HOWARD A

1 patent

US8331027B2Dec 11, 2012

Ultra-high density diffraction grating

PADMORE HOWARD A4 citations47