Inventor
WASHABAUGH PETER D
US3 patents
⚠️ This page may combine multiple inventors who share the name “WASHABAUGH PETER D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV MICHIGAN
2 patentsUS6942750B2Sep 13, 2005
Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication
UNIV MICHIGAN44 citations90
US7008193B2Mar 7, 2006
Micropump assembly for a microgas chromatograph and the like
UNIV MICHIGAN48 citations86