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Inventor
HSU FU-CHI
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “HSU FU-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YANG KU-FENG
1 patent
US8252682B2
Aug 28, 2012
Method for thinning a wafer
YANG KU-FENG
8 citations
80
TAIWAN SEMICONDUCTOR MFG
1 patent
US6869836B1
Mar 22, 2005
ILD stack with improved CMP results
TAIWAN SEMICONDUCTOR MFG
2 citations
60