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Inventor
WEI HSIEH-CHING
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “WEI HSIEH-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
1 patent
US9583352B2
Feb 28, 2017
Method of etching and cleaning wafers
TAIWAN SEMICONDUCTOR MFG CO LTD
2 citations
68
TAIWAN SEMICONDUCTOR MFG
1 patent
US9136149B2
Sep 15, 2015
Loading port, system for etching and cleaning wafers and method of use
TAIWAN SEMICONDUCTOR MFG
0 citations
48