Inventor

POPOVA IRENE Y

US2 patents

⚠️ This page may combine multiple inventors who share the name “POPOVA IRENE Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US7655379B2Feb 2, 2010

Ionic, organic photoacid generators for DUV, MUV and optical lithography based on peraceptor-substituted aromatic anions

IBM9 citations81

CAMERON JAMES F

1 patent

US9726977B2Aug 8, 2017

Coating compositions suitable for use with an overcoated photoresist

CAMERON JAMES F1 citations48