Inventor

MÄKELÄ MAARIT

FI3 patents

Patents

3 patents

US10145009B2Dec 4, 2018

Vapor deposition of thin films comprising gold

ASM IP HOLDING BV4 citations82

US11047046B2Jun 29, 2021

Vapor deposition of thin films comprising gold

ASM IP HOLDING BV1 citations66

US11499227B2Nov 15, 2022

Vapor deposition of thin films comprising gold

ASM IP HOLDING BV0 citations60