Inventor

RITALA MIKKO

FI83 patents

⚠️ This page may combine multiple inventors who share the name “RITALA MIKKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RITALA MIKKO

ASM IP HOLDING BV

Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

Method for depositing a metal chalcogenide on a substrate by cyclical deposition

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Vapor deposition of thin films comprising gold

Vapor deposition of LiF thin films

Area selective organic material removal

Deposition of transition metal—comprising material

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Methods of forming a transition metal containing film on a substrate by a cyclical deposition process

Synthesis and use of precursors for ALD of group VA element containing thin films

Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process

Vapor deposition processes

Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

Atomic layer deposition of rhenium containing thin films

Methods for filling a gap feature on a substrate surface and related semiconductor structures

Area selective organic material removal

Synthesis and use of precursors for vapor deposition of tungsten containing thin films

Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures

Methods of forming a transition metal containing film on a substrate by a cyclical deposition process

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

ASM INT NV

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Methods for forming conductive titanium oxide thin films

Precursors and methods for atomic layer deposition of transition metal oxides

Precursors and methods for atomic layer deposition of transition metal oxides

ASM INT

Process for producing metal thin films by ALD

Method for preparing metal nitride thin films

Method of depositing rare earth oxide thin films

Process for producing metal thin films by ALD

Method for growing oxide thin films containing barium and strontium

Method for growing thin oxide films

PORE VILJAMI

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

ASM MICROCHEMISTRY LTD

Method for coating inner surfaces of equipment

ASM INTERNATIONAL NV

Method of depositing rare earth oxide thin films

ASM MICROCHEMISTRY OY

Method for growing thin oxide films

FÄRM ELINA

Microcontact printed films as an activation layer for selective atomic layer deposition

RITALA MIKKO

Method for growing thin oxide films

GLEMBOCKI OREST J

Metamaterial thin films

HATANPAA TIMO

Process for producing oxide films