Inventor
KADIJK EDWIN CORNELIS
NL14 patents
⚠️ This page may combine multiple inventors who share the name “KADIJK EDWIN CORNELIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS8027019B2Sep 27, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations92
US12117721B2Oct 15, 2024
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US11537038B2Dec 27, 2022
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US12354891B2Jul 8, 2025
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US11942340B2Mar 26, 2024
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US11430678B2Aug 30, 2022
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US12051607B2Jul 30, 2024
Substrate positioning device with remote temperature sensor
ASML NETHERLANDS BV0 citations58
US11158484B2Oct 26, 2021
Electron beam inspection tool and method of controlling heat load
ASML NETHERLANDS BV0 citations55
US10268128B2Apr 23, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations32