Inventor

SPRENKLE RICHARD ALLEN

US5 patents

⚠️ This page may combine multiple inventors who share the name “SPRENKLE RICHARD ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US8853653B1Oct 7, 2014

Apparatus and techniques for controlling ion implantation uniformity

VARIAN SEMICONDUCTOR EQUIPMENT6 citations80

US9006692B2Apr 14, 2015

Apparatus and techniques for controlling ion implantation uniformity

VARIAN SEMICONDUCTOR EQUIPMENT1 citations48

APPLIED MATERIALS INC

2 patents

US12283460B2Apr 22, 2025

Closed loop faraday correction of a horizontal beam current profile for uniform current tuning

APPLIED MATERIALS INC1 citations53

US12340967B2Jun 24, 2025

Methods, mediums, and systems for identifying tunable domains for ion beam shape matching

APPLIED MATERIALS INC0 citations45

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent

US10199257B2Feb 5, 2019

Fixed position mask for workpiece edge treatment

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations38