Inventor

EITOKU HIROFUMI

JP3 patents

Patents

3 patents

US8969211B2Mar 3, 2015

Method and apparatus for plasma processing

HITACHI HIGH TECH CORP8 citations82

US10121640B2Nov 6, 2018

Method and apparatus for plasma processing

HITACHI HIGH TECH CORP4 citations71

US12573593B2Mar 10, 2026

Plasma processing method

HITACHI HIGH TECH CORP0 citations47