Inventor

XU XUMOU

US2 patents

⚠️ This page may combine multiple inventors who share the name “XU XUMOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAI HUIXIONG

1 patent

US8501395B2Aug 6, 2013

Line edge roughness reduction and double patterning

DAI HUIXIONG5 citations64

CHEN HUI W

1 patent

US8293460B2Oct 23, 2012

Double exposure patterning with carbonaceous hardmask

CHEN HUI W2 citations50