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Inventor
TOMA DOREL L
US
3 patents
⚠️ This page may combine multiple inventors who share the name “TOMA DOREL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US9184047B2
Nov 10, 2015
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD
465 citations
98
US7622378B2
Nov 24, 2009
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD
487 citations
98
LIU JUNJUN
1 patent
US8642488B2
Feb 4, 2014
Multi-step system and method for curing a dielectric film
LIU JUNJUN
468 citations
97