Inventor
KENT ERIC RICHARD
US4 patents
Patents
4 patentsUS9355200B2May 31, 2016
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV16 citations90
US9804504B2Oct 31, 2017
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV13 citations82
US10007744B2Jun 26, 2018
Process based metrology target design
ASML NETHERLANDS BV2 citations68
US10296681B2May 21, 2019
Process based metrology target design
ASML NETHERLANDS BV1 citations58