Inventor
KITO HIDEYUKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KITO HIDEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
7 patentsUS6383907B1May 7, 2002
Process for fabricating a semiconductor device
SONY CORP252 citations98
US6407011B1Jun 18, 2002
Low dielectric constant insulating films with laminated carbon-containing silicon oxide and organic layers
SONY CORP69 citations95
US6709979B2Mar 23, 2004
Method of manufacturing a semiconductor device
SONY CORP21 citations92
US5578530ANov 26, 1996
Manufacturing method of semiconductor device which includes forming a silicon nitride layer using a Si, N, and F containing compound
SONY CORP28 citations92
US6878632B2Apr 12, 2005
Semiconductor device having a conductive layer with a cobalt tungsten phosphorus coating and a manufacturing method thereof
SONY CORP17 citations84
US6602787B2Aug 5, 2003
Method for fabricating semiconductor devices
SONY CORP9 citations73
US6736699B2May 18, 2004
Electrolytic polishing apparatus, electrolytic polishing method and wafer subject to polishing
SONY CORP5 citations62