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Inventor
BAXTER NATE
US
3 patents
Patents
3 patents
US6491806B1
Dec 10, 2002
Electroplating bath composition
INTEL CORP
59 citations
92
US6893550B2
May 17, 2005
Electroplating bath composition and method of using
INTEL CORP
25 citations
89
US7241706B2
Jul 10, 2007
Low k ILD layer with a hydrophilic portion
INTEL CORP
0 citations
39