Inventor

LEWIS MARK R

US4 patents

⚠️ This page may combine multiple inventors who share the name “LEWIS MARK R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

2 patents

US6914927B2Jul 5, 2005

Laser discharge chamber passivation by plasma

CYMER INC5 citations71

US6644324B1Nov 11, 2003

Laser discharge chamber passivation by plasma

CYMER INC4 citations60

BABCOCK POWER ENVIRONMENTAL INC

1 patent

US7931881B2Apr 26, 2011

Integrated boiler and air pollution control systems

BABCOCK POWER ENVIRONMENTAL INC8 citations76

ABRAMS RICHARD F

1 patent

US8142744B2Mar 27, 2012

Integrated boiler and air pollution control systems

ABRAMS RICHARD F0 citations43