Inventor

SUGIURA MASAHITO

JP25 patents

⚠️ This page may combine multiple inventors who share the name “SUGIURA MASAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUGIURA MASAHITO

TOKYO ELECTRON LTD

Film forming apparatus and method, and film modifying apparatus and method

Single-substrate-processing CVD apparatus and method

Single-substrate-heat-processing method for performing reformation and crystallization

Processing apparatus and processing method

Single-substrate-processing CVD method of forming film containing metal element

Method for forming carbon nanotubes and carbon nanotube film forming apparatus

Method for forming carbon nanotubes and carbon nanotube film forming apparatus

Film forming method, and film modifying method

Film forming method by radiating a plasma on a surface of a low dielectric constant film

Processing apparatus and film forming method

Film-forming method

Flim forming method of carbon-containing film by microwave plasma

Method and device for forming graphene structure

Method of making a semiconductor device including a graphene barrier layer between conductive layers

Pre-coating method and processing apparatus

Fabrication process of a semiconductor device

IBM

Low-pressure deposition of metal layers from metal-carbonyl precursors

Method of depositing metal layers from metal-carbonyl precursors

NIPPON DENSO CO

Filter element and fabrication method for the same

NEC CORP

Etching method

KAJIKAWA MASUNORI

Antibody having anti-cancer activity

KINO KOICHI

Treatment drug for autoimmune diseases and allergic diseases

SUGIURA MASAHITO

Method for forming tungsten film at a surface of a processing target material, film-forming apparatus, storage medium and semiconductor device with a tungsten film

MICROBIAL CHEM RES FOUND

Anti-CXADR antibody

DENSO CORP

Processing machine and bending method