Inventor
SAWASHIMA JUN
JP18 patents
Patents
18 patentsUS11075095B2Jul 27, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD7 citations82
US11819872B2Nov 21, 2023
Substrate processing apparatus and method of machining tubular guard
SCREEN HOLDINGS CO LTD4 citations72
US9793176B2Oct 17, 2017
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10332761B2Jun 25, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations71
US9460944B2Oct 4, 2016
Substrate treating apparatus and method of treating substrate
SCREEN HOLDINGS CO LTD5 citations67
US12327737B2Jun 10, 2025
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations61
US11610790B2Mar 21, 2023
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations61
US10403517B2Sep 3, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
US12358015B2Jul 15, 2025
Substrate processing apparatus and method of machining tubular guard
SCREEN HOLDINGS CO LTD0 citations60
US12138666B2Nov 12, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations52
US11810795B2Nov 7, 2023
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations52
US12145171B2Nov 19, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations51
US12145179B2Nov 19, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11996302B2May 28, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US12512342B2Dec 30, 2025
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations48
US11640916B2May 2, 2023
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations44
US10297476B2May 21, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations40
US9805938B2Oct 31, 2017
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38