Inventor
AOKI RIKUTA
JP4 patents
Patents
4 patentsUS11819872B2Nov 21, 2023
Substrate processing apparatus and method of machining tubular guard
SCREEN HOLDINGS CO LTD4 citations72
US12358015B2Jul 15, 2025
Substrate processing apparatus and method of machining tubular guard
SCREEN HOLDINGS CO LTD0 citations60
US12138666B2Nov 12, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations52
US12417931B2Sep 16, 2025
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41