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Inventor
SCHMOTZER MIKE
US
2 patents
Patents
2 patents
US9790595B2
Oct 17, 2017
Method and system to reduce outgassing in a reaction chamber
ASM IP HOLDING BV
471 citations
97
US8993054B2
Mar 31, 2015
Method and system to reduce outgassing in a reaction chamber
ASM IP HOLDING BV
531 citations
97