Inventor

HYATT BADRU D

US2 patents

⚠️ This page may combine multiple inventors who share the name “HYATT BADRU D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US10692705B2Jun 23, 2020

Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber

TOKYO ELECTRON LTD5 citations71

SENSYS INSTR CORP

1 patent

US6572456B2Jun 3, 2003

Bathless wafer measurement apparatus and method

SENSYS INSTR CORP0 citations45