Inventor
KAPP DAN
US2 patents
Patents
2 patentsUS9709510B2Jul 18, 2017
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
KLA TENCOR CORP23 citations90
US10215713B2Feb 26, 2019
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
KLA TENCOR CORP0 citations48