Inventor
MARGETIS JOSEPH P
US3 patents
Patents
3 patentsUS11814747B2Nov 14, 2023
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly
ASM IP HOLDING BV3 citations68
US12195876B2Jan 14, 2025
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly
ASM IP HOLDING BV0 citations58
US12252785B2Mar 18, 2025
Method for cleaning quartz epitaxial chambers
ASM IP HOLDING BV0 citations43