Inventor
IWASAKA HIDEAKI
JP3 patents
Patents
3 patentsUS10964564B2Mar 30, 2021
Heating treatment apparatus and heating treatment method
TOKYO ELECTRON LTD2 citations68
US11842906B2Dec 12, 2023
Heating treatment apparatus and heating treatment method
TOKYO ELECTRON LTD0 citations58
US12409470B2Sep 9, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47