Inventor

HSU LUKE

TW3 patents

⚠️ This page may combine multiple inventors who share the name “HSU LUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WU KEN

2 patents

US8624345B2Jan 7, 2014

Photomask and photomask substrate with reduced light scattering properties

WU KEN0 citations47

US8198118B2Jun 12, 2012

Method for forming a robust mask with reduced light scattering

WU KEN0 citations47

TAIWAN SEMICONDUCTOR MFG

1 patent

US7727682B2Jun 1, 2010

System and method for providing phase shift mask passivation layer

TAIWAN SEMICONDUCTOR MFG4 citations58