Inventor

JEONG CHOON SIK

KR2 patents

Patents

2 patents

US12243724B2Mar 4, 2025

Batch type substrate processing apparatus

EUGENE TECHNOLOGY CO LTD0 citations44

US9818604B2Nov 14, 2017

Method for depositing insulating film on recessed portion having high aspect ratio

EUGENE TECHNOLOGY CO LTD1 citations42