Inventor
KIM EUI-SONG
KR3 patents
Patents
3 patentsUS5837593ANov 17, 1998
Methods of fabricating microelectronic capacitors having tantalum pentoxide dielectrics
SAMSUNG ELECTRONICS CO LTD80 citations94
US6118146ASep 12, 2000
Microelectronic capacitors having tantalum pentoxide dielectrics
SAMSUNG ELECTRONICS CO LTD12 citations71
US5077236ADec 31, 1991
Method of making a pattern of tungsten interconnection
SAMSUNG ELECTRONICS CO LTD5 citations57