Inventor
RUSSELL EDMUND G
US3 patents
Patents
3 patentsUS6797644B2Sep 28, 2004
Method to reduce charge interface traps and channel hot carrier degradation
TEXAS INSTRUMENTS INC9 citations64
US7504339B2Mar 17, 2009
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits
TEXAS INSTRUMENTS INC1 citations48
US6917093B2Jul 12, 2005
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits
TEXAS INSTRUMENTS INC1 citations48