Inventor
MEHIGAN JASON D
US2 patents
Patents
2 patentsUS7504339B2Mar 17, 2009
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits
TEXAS INSTRUMENTS INC1 citations48
US6917093B2Jul 12, 2005
Method to form shallow trench isolation with rounded upper corner for advanced semiconductor circuits
TEXAS INSTRUMENTS INC1 citations48