Inventor

BANDY KENNETH A

US3 patents

Patents

3 patents

US6576507B1Jun 10, 2003

Selectively removable filler layer for BiCMOS process

IBM9 citations70

US7060626B2Jun 13, 2006

Multi-run selective pattern and etch wafer process

IBM5 citations55

US7354867B2Apr 8, 2008

Etch process for improving yield of dielectric contacts on nickel silicides

IBM1 citations50