Inventor

MERKL CHRISTOPH

DE4 patents

⚠️ This page may combine multiple inventors who share the name “MERKL CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON THERMAL PRODUCTS GMBH

2 patents

US7169717B2Jan 30, 2007

Method of producing a calibration wafer

MATTSON THERMAL PRODUCTS GMBH13 citations81

US7412299B2Aug 12, 2008

Process for determining the temperature of a semiconductor wafer in a rapid heating unit

MATTSON THERMAL PRODUCTS GMBH2 citations58

MERKL CHRISTOPH

1 patent

US8335658B2Dec 18, 2012

Method and apparatus for determining measurement values

MERKL CHRISTOPH5 citations51

SCHANZ ROLAND

1 patent

US8282272B2Oct 9, 2012

Calibration substrate and method of calibration therefor

SCHANZ ROLAND0 citations36