Inventor

TOMITA MASAKI

JP21 patents

⚠️ This page may combine multiple inventors who share the name “TOMITA MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOMITA MASAKI

EBARA CORP

Current measuring module using inspection substrate and inspection substrate

Device for measuring bump height, apparatus for processing substrate, method of measuring bump height, and storage medium

Plating apparatus and substrate holder operation method

Plating apparatus and plating method

Plating apparatus and substrate cleaning method

Cleaning device, plating device including the same, and cleaning method

Device for inspecting a bump height surrounded by resist, device for processing a substrate, method for inspecting a bump height, and storage medium

Plating apparatus

Plating apparatus and cleaning method of contact member of plating apparatus

Plating apparatus and film thickness measuring method for substrate

Method of liquid management in anode chamber and apparatus for plating

Plating apparatus

Plating apparatus and contact cleaning method

Plating process method

Plating apparatus

Plating device and resistor

Substrate holding device

Inspection method, inspection device, and plating apparatus including the same

Plating apparatus

TDK CORP

Permanent magnet

Permanent magnet