Inventor
HSU FAN-YI
TW19 patents
⚠️ This page may combine multiple inventors who share the name “HSU FAN-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS12388010B2Aug 12, 2025
Via anchor profile control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12519059B2Jan 6, 2026
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11090696B2Aug 17, 2021
Apparatus and method of removing photoresist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9449828B2Sep 20, 2016
Method of forming metal gate electrode
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10486204B2Nov 26, 2019
Semiconductor apparatus and method of removing photoresist layer on substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10056462B2Aug 21, 2018
Metal gate structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
TAIWAN SEMICONDUCTOR MFG
4 patentsUS8048733B2Nov 1, 2011
Method for fabricating a gate structure
TAIWAN SEMICONDUCTOR MFG29 citations90
US8361855B2Jan 29, 2013
Method for fabricating a gate structure
TAIWAN SEMICONDUCTOR MFG15 citations82
US9281307B2Mar 8, 2016
Plasma doping to reduce dielectric loss during removal of dummy layers in a gate structure
TAIWAN SEMICONDUCTOR MFG4 citations72
US9196691B2Nov 24, 2015
Metal gate electrode of a field effect transistor
TAIWAN SEMICONDUCTOR MFG0 citations52