Inventor

MIZOTA TAKASHI

JP3 patents

Patents

3 patents

US10287159B2May 14, 2019

MEMS device

MURATA MANUFACTURING CO3 citations68

US10175045B2Jan 8, 2019

Vibrator drive circuit

MURATA MANUFACTURING CO0 citations48

US9764943B2Sep 19, 2017

MEMS structure

MURATA MANUFACTURING CO0 citations36