Inventor
NOOT MARC JOHANNES
NL5 patents
Patents
5 patentsUS10908513B2Feb 2, 2021
Metrology method and apparatus and computer program
ASML NETHERLANDS BV3 citations68
US10295913B2May 21, 2019
Inspection method and apparatus, and corresponding lithographic apparatus
ASML NETHERLANDS BV5 citations66
US12013647B2Jun 18, 2024
Metrology method
ASML NETHERLANDS BV0 citations59
US10451978B2Oct 22, 2019
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations49
US10705437B2Jul 7, 2020
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations38