Inventor
PAWLOWSKI MICHAL EMANUEL
US6 patents
⚠️ This page may combine multiple inventors who share the name “PAWLOWSKI MICHAL EMANUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
5 patentsUS12442759B2Oct 14, 2025
Contaminant analyzing metrology system, lithographic apparatus, and methods thereof
ASML HOLDING NV0 citations56
US12405227B2Sep 2, 2025
Method for region of interest processing for reticle particle detection
ASML HOLDING NV0 citations56
US11803119B2Oct 31, 2023
Contaminant detection metrology system, lithographic apparatus, and methods thereof
ASML HOLDING NV0 citations55
US12140870B2Nov 12, 2024
Double-scanning opto-mechanical configurations to improve throughput of particle inspection systems
ASML HOLDING NV0 citations46
US12379655B2Aug 5, 2025
Contaminant identification metrology system, lithographic apparatus, and methods thereof
ASML HOLDING NV0 citations43