Inventor

KOLENKOW ROBERT J

US3 patents

⚠️ This page may combine multiple inventors who share the name “KOLENKOW ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTEVAC INC

2 patents

US5873989AFeb 23, 1999

Methods and apparatus for linear scan magnetron sputtering

INTEVAC INC69 citations94

US5830327ANov 3, 1998

Methods and apparatus for sputtering with rotating magnet sputter sources

INTEVAC INC84 citations92

CYBEQ SYST INC

1 patent

US5205082AApr 27, 1993

Wafer polisher head having floating retainer ring

CYBEQ SYST INC357 citations96