Inventor

BULLARD TIMOTHY SCOTT

US3 patents

Patents

3 patents

US6022266AFeb 8, 2000

In-situ pad conditioning process for CMP

IBM76 citations91

US6352596B2Mar 5, 2002

Post CMP cleaning method using a brush cleaner with torque monitor

IBM27 citations89

US6269510B1Aug 7, 2001

Post CMP clean brush with torque monitor

IBM31 citations89